Novel mass air flow meter for automobile industry based on thermal flow microsensor. I. Analytical model and microsensor

نویسندگان

چکیده

برای دانلود باید عضویت طلایی داشته باشید

برای دانلود متن کامل این مقاله و بیش از 32 میلیون مقاله دیگر ابتدا ثبت نام کنید

اگر عضو سایت هستید لطفا وارد حساب کاربری خود شوید

منابع مشابه

Thermal Microsensor for Application in Radiometer

In this paper presents two microsensors structures compatible with microelectronic technologies that are analyzed for application in radiometers. The first structure is formed by one resistor that is made by doping a monocrystalline silicon substrate with boron. The second is a polysilicon resistor doped with phosphorous, over a silicon dioxide (SiO2). The analysis is made by mathematical model...

متن کامل

Novel Air Flow Meter for an Automobile Engine Using a Si Sensor with Porous Si Thermal Isolation

An air flow meter for measuring the intake air of an automobile engine is presented. It is based on a miniaturized silicon thermal mass flow sensor using a thick porous Si (Po-Si) layer for local thermal isolation from the Si substrate, on which the sensor active elements are integrated. The sensor is mounted on one side of a printed circuit board (PCB), on the other side of which the readout a...

متن کامل

Bridge-Based Microsensor for Determining the Thermal Properties of Liquids

Due to unique features like small thermal masses and reduced conductivities, miniaturized thermal sensors offer properties superior to those provided by comparable macroscopic measurement setups. In this contribution a micromachined device is applied to characterize the thermal transport properties of various liquids. By means of sinusoidal excitation of a heater structure placed on a micro-bri...

متن کامل

Analytical Approach for Vibration Analysis of a Microsensor with Two layers of Silicon and Piezoelectric based on MCST

The vibration analysis is an important step in the design and optimization of microsensors. In most of the cases, COMSOL software is employed to consider the size-dependency on the dynamic behavior in the MEMS sensors. In this paper, the Modified Couple Stress Theory (MCST) is used to capture the size effect on dynamic behavior in a microsensor with two layers of the silicon and piezoelectric. ...

متن کامل

Gallium Arsenide Based Microsensor Systems

Gallium Arsenide (GaAs) based microsensors, analog readout electronics, analog to digital converters and digital signal processors have been in development. Microsensors include accelerometers, infrared sensors, and micromachines with high speed sensing response, extreme temperature operation, and high radiation hardness.

متن کامل

ذخیره در منابع من


  با ذخیره ی این منبع در منابع من، دسترسی به آن را برای استفاده های بعدی آسان تر کنید

ژورنال

عنوان ژورنال: Flow Measurement and Instrumentation

سال: 2013

ISSN: 0955-5986

DOI: 10.1016/j.flowmeasinst.2013.01.006